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Author
:
Maksym Bondarenko
Publications
Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage
Maksym Bondarenko
,
Victor Antonyuk
,
Iuliia Bondarenko
,
Iryna Makarenko
and
Sergii Vysloukh
EasyChair Preprint 4970
Keyphrases
Accuracy
,
atomic force microscopy
,
Microhardness
,
Nanoelectronics
,
silicic probe
.
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